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Handbook of Silicon Semiconductor Metrology

By Alain C. Diebold
MRP: Rs.20,198.50 You save: Rs.2,019.85 (10%)
Net Price: Rs.18,178.65
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9780824705060
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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
Author:
Alain C. Diebold
Publisher:
Marcel Dekker Inc.
Year:
2001
Edition:
1
Binding:
Hardback
Page:
874
Country Origin:
UK
Condition Type:
New
Leadtime to ship in days (default):
Usually ships in 4 Days